Facilities Showcase

The Institute for NanoSystems Innovation at Northeastern University boasts extensive nanoscale laboratory environments that span the full spectrum of research and fabrication.

Our facilities

At the Institute for NanoSystems Innovation, our facilities are optimized to address the growing demand for sensing, communication, and artificial intelligence at the chip-scale while reducing the time for innovation and transition of new, foundational nano-system technologies. 

Our Boston facilities span over 10,000 square feet across three buildings and claim robust state-of-the-art laboratories for research and development.

NanoSI Institute Facilities Boston

Kostas Nanofabrication Laboratory - Egan

Kostas Nanofabrication Laboratory (KNL)

  • Class 10/100 150-mm & 200-mm cleanroom facility
  • Class 1000 imaging and support space
  • Patterning – Contact Aligner/i-Line Direct Write/ EBeam
  • Imaging – SEM/AFM/Optical Microscope
  • Plasma Etch – RIE/ICP/ICP-ALE
  • PVD and CVD – Evaporator/DC&RF Sputtering/Reactive Sputtering

Piezoelectric Micro and Nanosystems

  • 200-mm lab-to-fab facility for piezo/ferroelectric micro and nanosystems
  • Evatec CLUSTERline 200 PVD Cluster, reactive co-sputtering (PM1), and RF Sputtering 12” Alloy targets (PM6) – PVD III-Nitrides
  • AJA Sputter 200mm DC and RF metals, ceramics, and magnetic materials and dedicated system for superconductors
  • ALD high-K dielectrics and thin film oxide ferroelectrics

Expanding Nanofabrication Capabilities

Laser Direct Write

  • Chips up to 200 mm substrates and photomasks
  • i-line resist processing
  • HiRes write mode (300nm CD) and write mode III (high throughput)
  • ALD high-K dielectrics and thin film oxide ferroelectrics

Takachi ICP-ALE Plasma Etch

  • 2000 W ICP, dual pulsing RF bias (600W 13.6MHz + 600W 40.8MHz)
  • Metals and dielectric etcher (14 gas channels, -40 – 250 oC)
  • Atomic Layer Etch (ALE) kit (BCL3/Cl2/O2/HBr)
  • Specialized gasses Oxide and Nitrides processing (high selectivity)
  • In-situ metrology: OES and capable of ellipsometry, stress, and Langmuir probe

Takachi HDP-CVD Deposition

  • 2000 W ICP, and 600W pulsing RF bias (50 – 250 oC)
  • Conformal Oxides, Nitrides and Oxynitrides
  • a-Si & a-Ge undoped and doped (PH3, B2H6) films and a-SiC (CH4)

NanoSI EXP Facilities

NanoSI EXP Facilities

NanoSI Electronics and RF Suite 4 labs, Open lab and offices NanoSI Optical and Metrology Suite 12 labs + 1 shared facility NanoSI Manufacturing and Biosensing Suite 7 labs + Graduate offices

Electronics and RF Suite

  • Graduate and research scientist offices
  • Mixed signal electronics lab
  • RF & mmWave Laboratory
  • Sensor lab
  • Wafer and chip probing facility

Optical and Metrology Suite

Currently under construction

Nanophotonic Labs
Eight dedicated optical labs, including two cryo labs with two dedicated support rooms for mechanical and cryo pump

Environmental NanoSystem Test Facility and Microcalorimetry Lab

High Voltage and e-Beam Testing Laboratory

Advanced Metrology Lab
Material and device metrology

Manufacturing and Bio Suite

NanoSI Electronics and RF Suite
4 labs, Open lab and offices

AME and Advanced Manufacturing

Advanced Packaging lab(s)
chip-level and board-level labs

OUR OTHER CAMPUSES

Northeastern University
Burlington Innovation Campus

Our 14-acre Burlington campus, featuring a 20,000 square ft clean room, is dedicated to innovative research and entrepreneurship. Here, university students work hands-on alongside experienced and well-educated faculty members and professionals across various industries, government agencies, and academia.

The campus is located on Boston’s Route 128 high-tech corridor and is designed to accelerate innovation and discovery in emerging fields, from nano and quantum technologies to cybersecurity and nanomedicine.

 

Northeastern University Burlington Innovation Campus
Northeastern University Oakland Campus

Northeastern University
Oakland Campus

Our Oakland campus is situated on 135 acres, nestled in the Oakland hills. Its San Francisco Bay Area location enables close collaboration with Silicon Valley leaders, US National Labs (LBNL, LLNL, Sandia), and other universities. The area is home to numerous startup incubators and venture capital funds.

Our Oakland campus leverages existing university cleanroom facilities at UC Berkley and Stanford University.

 

CONNECT WITH US

Looking to start a conversation? Connect with us at nanosi@northeastern.edu